(12) United States Patent ao) Patent No.: us 6,470,110 Bi
Lin (45) Date of Patent: Oct. 22,2002
(54) MONOLITHIC INTEGRATION OF CONTROL ELEMENTS AND MICRO-MIRROR IN AN OPTICAL SWITCH
(75) Inventor: Lih Y. Lin, Little Silver, NJ (US)
(73) Assignee: Tellium, Inc., Oceanport, NJ (US)
( * ) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 78 days.
(21) Appl. No.: 09/691,193
(22) Filed: Oct. 19, 2000
(51) Int. C I. G02B 6/26
(52) U.S. CI 385/18; 385/15; 385/16;
385/17; 385/14
(58) Field of Search 385/16, 17, 18,
385/15, 14, 20, 21, 22, 23, 24
(56) References Cited
U.S. PATENT DOCUMENTS
4,566,935 A * 1/1986 Hornbeck 156/626
