(12) United States Patent ao) Patent No.: us 6,423,273 Bi
O'Mara (45) Date of Patent: Jul. 23,2002
U.S. Patent Jul.23,2002 Sheet 2 of 3 US 6,423,273 Bl
Amicrolluidic device has a seal or other component between two adjacent layers. The seal or other component is formed ol a sheet ol material having a first thickness. The seal material has boss portions that have a second thickness greater than the first thickness. A plurality ol holes are formed through the boss portion. A method for making the seal layer includes the step ol thinning the seal material between a first film and a second film. Bosses are formed in the film. Holes are cut through the boss area. One film is removed from the seal material and the seal material is applied to a substrate. The seal material is cured to a substrate and the second film is removed from the seal material. Other components such as diaphragm may be formed using the above process without punching holes through the seal material.
3 Claims, 3 Drawing Sheets