A marker structure on a substrate for optical alignment of the substrate includes a plurality of first structural elements and a plurality of second structural elements. In use, the marker structure allows the optical alignment based upon providing at least one light beam directed on the marker structure,...http://www.google.fr/patents/US20040114143?utm_source=gb-gplus-shareBrevet US20040114143 - Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus
Marker structure for optical alignment of a substrate, a substrate including ...
Numéro de demande: 10/665,360 Numéro de publication: US 2004/0114143 A1 Date de dépôt: 22 sept. 2003 Brevet délivré: US7330261 ( Date de délivrance 12 févr. 2008)
