IIIH
US006407409B2
(12) United States Patent ao) Patent No.: us 6,407,409 B2
Cho et al. (45) Date of Patent: Jun. 18,2002
(54) METHOD AND APPARATUS FOR SINGLE CRYSTAL GALLIUM NITRIDE (GAN) BULK SYNTHESIS
(75) Inventors: Hak Dong Cho; Sang Kyu Kang, both of Cupertino, CA (US)
(73) Assignee: GAN Semiconductor, Inc., Sunnyvale, CA (US)
( * ) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 0 days.
(21) Appl. No.: 09/836,780
(22) Filed: Apr. 16, 2001
Related U.S. Application Data
(62) Division of application No. 09/478,954, filed on Jan. 7,2000. (60) Provisional application No. 60/115,177, filed on Jan. 8, 1999.
(51) Int. CI.7 H01L 29/22
(52) U.S. CI 257/78; 117/2
(58) Field of Search 257/79, 87, 101,
257/78; 438/46, 607, 22; 117/2
(56) References Cited
U.S. PATENT DOCUMENTS
4,135,951 A 1/1979 Stone 148/1.5
4,144,116 A * 3/1979 Jacob et al 156/611
5,633,192 A 5/1997 Moustakas et al 438/46
5,677,538 A 10/1997 Moustakas et al 250/370.12
5,679,152 A * 10/1997 Tischler et al 117/97
