US 7,094,673 B2 *Aug. 22, 2006
(54) ETCH STOP LAYER IN POLY-METAL STRUCTURES
(75) Inventor: Vishnu K. Agarwal, Boise, ID (US)
(73) Assignee: Micron Technology, Inc., Boise, ID (US)
( * ) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 0 days.
This patent is subject to a terminal disclaimer.
(21) Appl. No.: 10/894,292
(22) Filed: Jul. 19, 2004
(65) Prior Publication Data
US 2004/0259338 Al Dec. 23, 2004
Related U.S. Application Data
(62) Division of application No. 10/438,360, filed on May 14, 2003, now Pat. No. 6,875,679.
