United States Patent [i9] [ii] Patent Number: 5,064,337
Asakawa et al. [45] Date of Patent: Nov. 12, 1991
[54] HANDLING APPARATUS FOR
TRANSFERRING CARRIERS AND A
METHOD OF TRANSFERRING CARRIERS
[75] Inventors: Teruo Asakawa, Yamanashi; Tetsu Ohsawa, Kofu, both of Japan
[73] Assignee: Tokyo Electron Limited, Tokyo,
Japan
[21] Appl. No.: 552,852
[22] Filed: Jul. 12, 1990
Related U.S. Application Data
[63] Continuation of Ser. No. 221,090, Jul. 19, 1988, abandoned.
[51] Int. C1.5 B65G 1/133
[52] U.S. CI 414/639; 414/274;
414/275; 414/283; 414/786; 901/49; 98/115.3 [58] Field of Search 414/742, 331, 787, 785,
414/223, 225, 274-277, 279, 786, 281-283, 641, 639; 901/17, 35, 47, 49
[56] References Cited
U.S. PATENT DOCUMENTS
3,185,320 5/1965 Chasar et al 414/282
3,822,025 7/1974 Loas 414/277 X
4,016,987 4/1977 Stolzer 414/283
4,364,706 12/1982 Kranzlmuller 414/283 X
4,659,281 4/1987 Aupperle 414/787
4,708,566 11/1987 Stolzer et al 414/283 X
4,726,725 2/1988 Baker et al 414/283
4,735,539 4/1988 Hakkinen et al 414/282 X
4,766,322 8/1988 Hashimoto 901/35 X
4,770,590 9/1988 Hugues et al 414/331 X
4,775,281 10/1988 Prentakis 414/281 X
4,802,809 2/1989 Bonora et al 414/742 X
4,867,629 9/1989 Iwasawa et al 414/331
FOREIGN PATENT DOCUMENTS
159317 3/1983 German Democratic
Rep 414/283
20263 2/1978 Japan 414/275
20268 2/1978 Japan 414/275
52802 4/1980 Japan 414/283
48309 5/1981 Japan 414/274
124404 6/1986 Japan 414/276
127502 6/1986 Japan 414/277
275269 10/1964 Netherlands 414/279
Primary Examiner—David A. Bucci
Attorney, Agent, or Firm—Obion, Spivak, McClelland,
Maier & Neustadt
[57] ABSTRACT
A handling apparatus, used for handling a carrier of semiconductor wafers, comprises a first mechanism for transferring a carrier between a loader/unloader table and a storage compartment, and a second mechanism, for moving the first mechanism in both vertical and horizontal directions. The first mechanism includes an arm, a loading portion for loading the carrier, and an arm-rocking mechanism. The second mechanism moves the first mechanism to the loader/unloader table, picks up the carrier, and then moves the first mechanism to the storage compartment, where the arm is rocked, so as to discharge the object from the loading portion.
20 Claims, 12 Drawing Sheets
