SCANNING PROBE MICROSCOPE
APPARATUS FOR USE IN A SCANNING
 Inventors: Huddee Ho, San Jose; Paul E. West,
Cupertino, both of Calif.
 Assignee: Topometrix, Santa Clara, Calif.
 Appl. No.: 273,740
 Filed: Jul. 12, 1994
 Int. CI.6 HOI J 37/067
 U.S. CI 250/306; 250/442.11
 Field of Search 250/306, 307,
250/440.11, 441.11, 442.11
(56] References Cited
U.S. PATENT DOCUMENTS
4,724,318 2/1988 Binnig 250/306
4,798,989 1/1989 Miyazaki et al 250/491.1
4,874,945 10/1989 Ohi 250/311
4,948,971 8/1990 Vogen et al 250/310
4,992,660 2/1991 Kobayashi 250/306
5,081,353 1/1992 Yamadaetal 250/491.1
5,229,607 7/1993 Matsui et al 250/306
5,253,516 10/1993 Elings et al 73/105
5,256,876 10/1993 Hazaki et al 250/491.1
5,260,622 11/1993 West 310/328
5,283,442 2/1994 Martin et al 250/561
Hitachi, "S^UOO Hitachi Scanning Tunneling Microscope", pp. 1-22, has no date.
Hitachi, "Hitachi Scanning Tunneling Microscope", pp. 1-10, has no date.
Primary Examiner—Jack I. Berman
Assistant Examiner—Kiet T. Nguyen
Attorney, Agent, or Firm—Fulwider Patton Lee & Utecht
The scanning probe microscope translation apparatus includes a scanning probe microscope for examining a specimen, with a specimen stage for mounting the specimen for examination by the scanning probe microscope, and a first translator mounted to the scanning probe microscope for translating the specimen stage relative to the scanning probe microscope. A support frame is dimensioned and adapted to be mounted in a specimen chamber of a scanning electron microscope, and a second translator is provided for scanning the scanning probe microscope relative to the support frame. The second translator is mounted on dual mass plates provided for isolating the scanning probe microscope from external vibrations, and suspension O-rings arc provided for suspending the mass plates from the support frame. A vacuum load lock system permits moving the scanning probe microscope, specimen stage, first translator, and mounting assembly into and out of the vacuum of the scanning electron microscope vacuum chamber.
28 Claims, 9 Drawing Sheets