Leakage current is reduced in a piezoresistive transducer by forming a leakage barrier around a piezoresistive element of a piezoresistive transducer. The leakage barrier prevents the formation of a parasitic leakage path in the substrate thereby reducing the leakage current flowing through sections...http://www.google.fr/patents/US5074152?utm_source=gb-gplus-shareBrevet US5074152 - Piezoresistive transducer with low drift output voltage
Piezoresistive transducer with low drift output voltage
