(54) METHOD OF FABRICATING A
SEMI-TRANSMISSION LCD BY PLASMA
PROCESSING AND WASHING ORGANIC
FILM, AND LCD FABRICATED THEREBY
(75) Inventors: Satoshi Ihida, Tokyo (JP); Masaki
Shinohara, Tokyo (JP); Manabu
Oyama, Akita (JP)
(73) Assignee: NEC LCD Technologies, Ltd.,
( * ) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 214 days.
(21) Appl. No.: 10/282,179
(22) Filed: Oct. 29, 2002
(65) Prior Publication Data
US 2003/0081160 Al May 1, 2003
(30) Foreign Application Priority Data
Oct. 30, 2001 (JP) 2001-332902
(51) Int. CI.
(52) U.S. CI 349/114; 349/113; 349/122;
(58) Field of Classification Search 349/114,
349/122, 138 See application file for complete search history.
(56) References Cited
U.S. PATENT DOCUMENTS 5,959,312 A * 9/1999 Tsai et al 257/57
In a semi-transmission type liquid crystal display and a method for fabricating the same, a reflective electrode such as aluminum layer and a transparent electrode such as ITO film are used to form a pixel electrode that is provided on an organic film having an uneven surface. In order to effectively restrict the battery effect between a reflective electrode and a transparent electrode, a surface of the organic film is put in a plasma-processing and then is washed by a washing liquid. Thereafter, the transparent electrode is formed and then the reflective electrode such as a double layer electrode of the aluminum layer and the molybdenum layer are formed.
14 Claims, 8 Drawing Sheets