Semiconductor display device and a method of fabricating the same

[54] SEMICONDUCTOR DISPLAY DEVICE AND A METHOD OF FABRICATING THE SAME

[75] Inventors: Satoshi Ito; Futoshi Hiei; Akira

Ishibashi; Atsushi Toda; Norikazu
Nakayama, all of Kanagawa, Japan

[73] Assignee: Sony Corporation, Tokyo, Japan

[21] Appl. No.: 498,438
[22] Filed: Jul. 5,1995

Related U.S. Application Data

[62] Division of Ser. No. 197,310, Feb. 16, 1994, Pat. No. 5,459,337.

[30] Foreign Application Priority Data

Feb. 19, 1993 [JP] Japan 5-030560

Feb. 26, 1993 [JP] Japan 5-038899

[51] Int. CI.6 H01L 217265

[52] U.S. CI 437/23; 437/2; 437/3;

437/127

[58] Field of Search 437/23, 2, 3, 127;

257/78, 13, 94, 95, 96, 97

[56] References Cited

U.S. PATENT DOCUMENTS 4,371,406 2/1983 Li 437/2

4,690,714 9/1987 Li 437/2

4,992,837 2/1991 Sakai et al 257/97

5,037,709 8/1991 Tomomura et al 257/78

5,045,897 9/1991 Ahlgren 257/94

5,150,191 9/1992 Motegi et al 257/78

5,187,116 2/1993 Kitagawaetal 437/127

5,294,833 3/1994 Schetzina 257/94

5,296,718 3/1994 Fujita et al 257/94

5,324,963 6/1994 Kamata 257/96

FOREIGN PATENT DOCUMENTS

59-46073 3/1984 Japan 257/13

2283079 11/1990 Japan 257/89

Primary Examiner—Kevin Picardat

Attorney, Agent, or Firm—Hill, Steadman & Simpson

[57] ABSTRACT

A light emitting device and a method of fabricating the same in which a first cladding layer is formed on a substrate, then red, green and blue light emitting portions each made of II-VI semiconductor are formed in a horizontal direction with respect to a surface of the substrate on the first cladding layer, then a second cladding layer is formed on the light emitting portions, and the red, green and blue light emitting portions are electrically separated from each other so that three primary color light emitting portions of a self luminous type are formed on the same substrate through single crystal growth process by changing composition of a compound semiconductor layer.

4 Claims, 10 Drawing Sheets