Method of manufacturing a thermal bend actuator

(54) METHOD OF MANUFACTURING A THERMAL BEND ACTUATOR

(75) Inventor: Kia Silverbrook, Balmain (AU)

(73) Assignee: Silverbrook Research Pty Ltd.,

Balmain (AU)

( * ) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 0 days.

(21) Appl. No.: 09/524,958

(22) Filed: Mar. 14, 2000

(30) Foreign Application Priority Data

Mar. 16, 1999 (AU) PP 9223

(51) Int. C I. B41J 2 04

(52) U.S. CI 216/27; 347/54

(58) Field of Search 216/27; 347/20,

347/54, 61, 94; 438/21

(56) References Cited

U.S. PATENT DOCUMENTS

4,997,521 A * 3/1991 Howe et al 216/17

5,262,000 A * 11/1993 Welbourn et al 216/101

5,909,230 A * 6/1999 Choi et al 347/54

6,280,643 Bl * 8/2001 Silverbrook 216/27

FOREIGN PATENT DOCUMENTS

GB 2292608 2/1996

WO WO 99/03681 1/1999

* cited by examiner

Primary Examiner—Anita Alanko (57) ABSTRACT

A method of manufacture of a thermal bend actuator, the method comprising the steps of: (a) depositing and etching, using a first mask, a first material on a substrate to form a first conductive layer; (b) depositing and etching, using a second mask, a second material on the substrate to form a first sacrificial layer in a manner such that at least a portion of the first conductive layer remains uncovered; (c) depositing and etching, using a third mask, a third material on the substrate to form a first conductive bend actuator layer in a manner such that the first bend actuator layer is in electrical contact with the uncovered portion of the first conductive layer for, in use, conductive heating of the first bend actuator layer; (d) depositing and etching, using a fourth mask, a fourth material on the substrate to form a second sacrificial layer in a manner such that the second sacrificial layer covers substantially the entire first bend actuator layer; (e) depositing and etching using a fifth mask, a fifth material on the substrate to form a second bend actuator layer; and (f) etching away the first and second sacrificial layers, thereby forming a first gap between the first and the second bend actuator layers and a second gap between the first actuator layer and the top surface of the underlying substrate.

12 Claims, 30 Drawing Sheets