(i9) United States
(12) Patent Application Publication
Mignard et al.
(54) MEMS DEVICE HAVING A LAYER MOVABLE AT ASYMMETRIC RATES
(75) Inventors: Marc Mignard, San Jose, CA (US); Lior Kogut, Haifa (IL)
KNOBBE, MARTENS, OLSON & BEAR, LLP 2040 MAIN STREET, FOURTEENTH FLOOR IRVINE, CA 92614 (US)
(73) Assignee: QUALCOMM MEMS
Technologies, Inc., San Diego, CA
(21) Appl.No.: 12/488,366
(22) Filed: Jun. 19, 2009
Related U.S. Application Data
(62) Division of application No. 11/360,162, filed on Feb. 23, 2006, now Pat. No. 7,550,810.
(51) Int. CI.
H01L 29/84 (2006.01)
H01L 49/00 (2006.01)
H01L 21/02 (2006.01)
(52) U.S. CI 257/419; 438/53; 257/E29.324;
A microelectromechanical (MEMS) device includes a substrate and a movable layer mechanically coupled to the substrate. The movable layer moves from a first position to a second position at a first rate and from the second position to the first position at a second rate faster than the first rate. The MEMS device further includes an adjustable cavity defined between the substrate and the movable layer and containing a fluid. The MEMS device further includes a fluid conductive element through which the fluid flows at a first flowrate from inside the cavity to outside the cavity upon movement of the movable layer from the second position to the first position and through which the fluid flows at a second flowrate slower than the first flowrate from outside the cavity to inside the cavity upon movement of the movable layer from the first position to the second position.