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(12) United States Patent
(io) Patent No.: (45) Date of Patent:
US 7,064,838 B2 Jun. 20, 2006
(54) APPARATUS AND METHOD FOR
MEASUREMENT OF FIELDS OF
BACKSCATTERED AND FORWARD
SCATTERED/REFLECTED BEAMS BY AN
OBJECT IN INTERFEROMETRY
(75) Inventor: Henry Allen Hill, Tucson, AZ (US)
(73) Assignee: Zetetic Institute, Tucson, AZ (US)
( * ) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 68 days.
(21) Appl. No.: 10/816,172
(22) Filed: Apr. 1, 2004
(65) Prior Publication Data
US 2004/0227950 Al Nov. 18, 2004
Related U.S. Application Data
(60) Provisional application No. 60/460,129, filed on Apr. 3, 2003.
(51) Int. CI.
G01B 9/02 (2006.01)
(52) U.S. CI 356/450
(58) Field of Classification Search 356/450
See application file for complete search history.
(56) References Cited
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An interferometry system including an interferometer that includes a source imaging system that focuses an input beam onto a spot on or in the object and an object imaging system that images the spot onto a detector element as an interference beam, wherein the source imaging system is characterized by a first aperture stop that defines a first aperture and includes a first phase shifter that introduces a first phase shift in light passing through a first region of the first aperture relative to light passing through a second region of the first aperture, and wherein the object imaging system is characterized by a second aperture stop that defines a second aperture and includes a second phase shifter that introduces a second phase shift in light passing through a first region of the second aperture relative to light passing through a second region of the second aperture.
47 Claims, 4 Drawing Sheets
2004/0228008 Al 11/2004 Hill 2004/0246486 Al 12/2004 Hill 2004/0257577 Al 12/2004 Hill
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