[54] CMOS SENSOR
[75] Inventors: Ming-I Chen, Tainan Hsien;
Yung-Chieh Fan, Hsinchu, both of
Taiwan
[73] Assignee: United Microelectronics Corp.,
Hsinchu, Taiwan
[21] Appl. No.: 09/189,354 [22] Filed: Nov. 9, 1998
[51] Int. CI.7 H01L 27/148; H01L 29/768
[52] U.S. CI 257/232; 257/233; 257/292;
257/294; 257/436; 257/446; 438/60; 438/69;
438/75
[58] Field of Search 257/233, 232,
257/446, 436, 294, 292; 438/60, 75, 69
[56] References Cited
U.S. PATENT DOCUMENTS
4,450,466 5/1984 Nishizawa et al 357/30