[54] MICROELECTROMECHANICAL
TELEVISION SCANNING DEVICE AND
METHOD FOR MAKING THE SAME
[75] Inventor: Michael D. Johnson, Madison, Ala.
[73] Assignee: Medcam, Inc., Bellevue, Wash.
[ * ] Notice: This patent is subject to a terminal disclaimer.
08/583,045 Jul. 19, 1994 PCT/US94/08165 Apr. 24, 1996 § 102(e) Date: Apr. 24, 1996 [87] PCT Pub. No.: WO95/03562 PCT Pub. Date: Feb. 2, 1995
Related U.S. Application Data
[63] Continuation-in-part of application No. 08/093,580, Jul. 19, 1993, Pat. No. 5,673,139.
[51] Int. CI.6 G02B 26/08; G02B 26/10;
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[58] Field of Search 257/415; 359/296,
359/271, 846, 291-295, 298, 223, 224, 318; 348/203, 205; 235/462.33, 462.36
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5,606,447 2/1997 Asada et al 359/224
5,629,790 5/1997 Neukermans et al 359/198
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Primary Examiner—Georgia Epps
Assistant Examiner—Margaret Burke