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United States Patent [w]

Johnson

US005920417A [ii] Patent Number: [45] Date of Patent:

5,920,417 *Jul. 6,1999

[54] MICROELECTROMECHANICAL

TELEVISION SCANNING DEVICE AND
METHOD FOR MAKING THE SAME

[75] Inventor: Michael D. Johnson, Madison, Ala.

[73] Assignee: Medcam, Inc., Bellevue, Wash.

[ * ] Notice: This patent is subject to a terminal disclaimer.

[21] Appl. No.: [22] PCT Filed: PCT No.: § 371 Date

[86]

08/583,045 Jul. 19, 1994 PCT/US94/08165 Apr. 24, 1996 § 102(e) Date: Apr. 24, 1996 [87] PCT Pub. No.: WO95/03562 PCT Pub. Date: Feb. 2, 1995

Related U.S. Application Data

[63] Continuation-in-part of application No. 08/093,580, Jul. 19, 1993, Pat. No. 5,673,139.

[51] Int. CI.6 G02B 26/08; G02B 26/10;

G02B 7/198

[52] U.S. CI 359/223; 359/224; 359/298;

348/203; 348/205; 235/462.33; 235/462.36

[58] Field of Search 257/415; 359/296,

359/271, 846, 291-295, 298, 223, 224, 318; 348/203, 205; 235/462.33, 462.36

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5,123,812 6/1992 Greiff 357/25

5,606,447 2/1997 Asada et al 359/224

5,629,790 5/1997 Neukermans et al 359/198

FOREIGN PATENT DOCUMENTS

60- 107017 7/1985 Japan .

61- 118717 6/1986 Japan .
3-264911 11/1991 Japan .
6-208070 7/1994 Japan .

OTHER PUBLICATIONS

IEEE Proceedings, 1991, pp. 614-617.

Jaecklin et al, "Mechanical and Optical Properties ..." 1th IntT Conl. on Solid-State Sensors & Actuators, 1993, pp. 958-961.

Kleiman et al, "Torsional Oscillators," Rev. Sci Inst. 56(11). Nov., 1985 pp. 2088-2091.

Buser et al., "Very High Q-lactor ..." Sensors & Actuators, A21-A23 (1990) pp. 323-327.

Goto & Imanaka, "Super Compact Dual Axis Optical Scanning Unit Applying a Tortional Spring Resonator Driven by a Piezoelectric Actuator,"SPIE, vol. 1544, pp. 272-81.

Breng et al., "Electrostatic Micromechanic Actuators," (1992).

Rowe & Muller, "Polycrystalline and Amorphous Silicon Micromechanical Beams: Annealing and Mechanical Properties," Sensors and Actuators, vol. 4, pp. 447-54 (1983).

Pedder & Howe, "Thermal Assembly of Polysilicon Microstructures," IEEE (1991).

Petersen, "Silicon Torsional Scanning Mirror,"IBM J.
Research Development, vol. 24, No. 5 (Sep. 1980).

Primary Examiner—Georgia Epps
Assistant Examiner—Margaret Burke

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