A burn-in and electrical test system (20) includes a temperature controlled zone (22) and a cool zone (24) separated by a transition zone 25. The temperature controlled zone (22) is configured to receive a plurality of wafer cartridges (26) and connect the cartridges (26) to test electronics (28) and...http://www.google.fr/patents/US7928754?utm_source=gb-gplus-shareBrevet US7928754 - Wafer level burn-in and electrical test system and method
Wafer level burn-in and electrical test system and method
