Method and apparatus for optical inspection of an article are presented. The apparatus comprises an illumination unit and at least one detection unit. The illumination unit generates an incident beam and directs it onto a predetermined region of the article. The detection unit includes a light collection...http://www.google.fr/patents/US6366352?utm_source=gb-gplus-shareBrevet US6366352 - Optical inspection method and apparatus utilizing a variable angle design
Optical inspection method and apparatus utilizing a variable angle design
