A magnetic field enhanced plasma etch reactor system and method of operation is disclosed. In the system and operation, modulated sinusoidal currents are generated and applied 90.degree. out of phase to opposing pairs of series connected electromagnets to produce a modified rotating magnetic field parallel...http://www.google.fr/patents/US5534108?utm_source=gb-gplus-shareBrevet US5534108 - Method and apparatus for altering magnetic coil current to produce etch uniformity in a magnetic field-enhanced plasma reactor
Method and apparatus for altering magnetic coil current to produce etch ...
