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OBTAIN POSITION INFORMATION OF N POINTS ON
OUTER PERIPHERY EDGE OF LIQUID-REPELLENT PLATE
BY IMAGE PROCESSING METHOD.
BASED ON IMAGING RESULTS AND CORRESPONDING
MEASUREMENT RESULTS OF INTERFEROMETER SYSTEM
OBTAIN POSITION INFORMATION OF A PART OF WAFER HOLDER, AND BASED ON THE POSITION INFORMATION AND POSITION INFORMATION OF LIQUID-REPELLENT PLATE. CALCULATE POSITION RELATION BETWEEN THE TWO
