Light sensitive display

DATA DATA DATA
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GATEMETAL PHOTOLITH/
DEPOSITION > ETCH
FIG. 4A FIG. 4B
GATEINSULATOR
1 A-SILICON, and PHOTOLITH/
I1 + A—SILICON > ETCH
DEPOSITIONS
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SOURCE/DRAIN
M AL PHOTOLITH/
DEPSSIITION ETCH
FIG. 4E FIG 4F
ITO PHOTOLITH/
DEPOSITION ETCH
FIG. 4G FIG. 4H
FIGS. 4A-4H

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PIXEL ELECTRODES
COLOR FILTER BLACK MATRIX/ OPENING IN BLACK MATRIX BLACK MATRIX
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SOURCE PHOTO TFT DRA1N DRA1N READDUT TFT 50URCE
. / 1F‘——'TT \- / ~ADOUT LINE
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COMMON LINE ’\ GATE METAL \ GATE METAL
GATE INSULATOR GATE INSULATOR
AMORPHOUS SILICON AMORPHOUS SILICON

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